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Micromachines
Scopus
ISSN 2072-666X · MDPI AG · 13.607 artikel di indeks
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2D and 3D Interdigital Capacitors and Bias Tees Technologies on MnM Interposer for mmWave Applications
This paper presents two capacitors fabricated using the metallic nanowire membrane (MnM) interposer technology operating at mmWaves. Standard 2D interdigital capacitors (IDCs) are designed to operate up to 70 GHz, which presents a straightforward and non-complex fabrication. In comparison, this…
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Collective Magnetic Mesoporous Silica Nanorobots for Targeted Oral Capsaicin Delivery in Colitis Intervention
Magnetic nanoparticles, with their excellent biocompatibility and biodegradability, serve as ideal materials for constructing targeted drug delivery systems. Iron oxide (Fe3O4) nanoparticles, controllably prepared via methods such as solvothermal synthesis, can be combined with mesoporous silica to…
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A Low-Noise MEMS Accelerometer Based on a Symmetrical Sandwich Capacitor Structure
This study presents a high-performance MEMS accelerometer employing a symmetrical differential ‘sandwich’ capacitive structure. An orthogonal rectangular compensation method was integrated with wet anisotropic etching to achieve high structural symmetry. An innovative glass–silicon composite cover…
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Multi-Objective Optimization and Performance Evaluation of Rhombic Pin-Fin Microchannel Heat Sinks with Diverse Manifold Configurations
In response to the increasingly severe heat dissipation challenges in electronic devices, three types of manifold microchannel heat sinks (MMC) incorporating rhombic pin-fins were proposed. Under the constraint that the maximum temperature of the heat source surface remains below 343.15 K…
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Single-Imaging Parasite-Quantification Microfluidic Device for Detection and Analysis of Schistosoma Eggs in Urine
The accurate diagnosis of schistosomiasis for effective disease surveillance, treatment, and follow-up is crucial to attain the World Health Organization’s 2030 goal to eliminate schistosomiasis as a public health problem. The current diagnostic tools for urinary schistosomiasis, including the gold…
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Design, Modeling, and Fabrication of a High-Q AlN Annular Gyroscope with Sub-10°/h Bias Instability
This work presents a high-performance piezoelectric MEMS yaw gyroscope fabricated on a single-crystal silicon platform, which achieves a quality factor of 75 k—the highest reported to date among silicon-based piezoelectric gyroscopes. The device employs a wide annular resonator that operates at 132…
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MXene- and MOF-Based Hydrogels: Emerging Platforms for Electrochemical Biosensing and Health Monitoring
Smart healthcare is rapidly emerging as a transformative paradigm, enabling simultaneous health monitoring, therapeutic intervention, and early prediction of disease onset. In this context, electrochemical monitoring systems have attracted growing interest due to their cost-effectiveness, ease of…
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The Transition from the Fowler–Nordheim Regime to the Space-Charge-Limited Current Regime in the Case of a Pointed Nanometric Emitter
We examine the transition from the Fowler–Nordheim (FN) field emission regime to the space-charge-limited (SCLC) regime in the case of a pointed nanometric emitter with radius of curvature R ≥ 5 nm, for which the traditional FN equations do not hold. To accomplish this, we use the generalized FN…
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Terahertz Wave Absorber Relying on Strontium Titanate and Dirac Semimetal for Dual Adjustability
Limited by the material response characteristics and structural design, the development of dynamically tunable terahertz absorbers with multi-functional properties remains a major challenge. In this study, a dual-tunable terahertz absorber based on the synergistic integration of strontium titanate…
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Design and Study of a PVDF Piezoelectric Film Force Sensor Based on Interface Force Field Reconstruction and Surface Domain Segmentation
The accurate measurement of dynamic forces is pivotal for advancing manufacturing process monitoring and enhancing equipment intelligence. To address the challenges of contact interface force field nonlinearity in existing PVDF piezoelectric film force sensors and the inability of a monolithic PVDF…
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Vibration Resistance Optimization of Housing Based on CCD and Multi-Objective PSO
To improve the operational reliability of semiconductor laser diode array beam combining systems under vibration conditions, this study introduces an integrated optimization approach combining central composite design (CCD) with multi-objective particle swarm optimization (PSO). The methodology…
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Enhancement of TIRF Imaging of 3D-Cultured Spheroids via Hydrostatic Compression Using a Balloon Actuator
Three-dimensional (3D) cultured cells can mimic the in vivo tumor microenvironment more accurately than conventional monolayer cultures. Therefore, they are essential in cancer research and drug discovery. However, high-sensitivity fluorescence imaging of 3D spheroids remains challenging owing to…
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Active Wavelength Control of Fiber Bragg Gratings: A Systematic Review of Tuning Mechanisms, Emerging Applications, and Future Frontiers
Fiber Bragg gratings (FBGs) have evolved from passive sensing elements into actively programmable photonic components, enabling dynamic wavelength control across diverse applications. This review provides a comprehensive and systematic overview of active wavelength control technologies for FBGs…
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Development and Characterization of Dissolving Microneedles for the Buccal Delivery of Cannabidiol (CBD)
This study aimed to develop dissolving microneedles (MNs) for the buccal delivery of cannabidiol (CBD). CBD is a non-psychotomimetic phytocannabinoid with anti-inflammatory and anxiolytic properties. The MN arrays were produced using micromolding, which has the ability of scalability. However, this…
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Soft Biomimetic Underwater Vehicles: A Review of Actuation Mechanisms, Structure Designs and Underwater Applications
The growing demand for marine resource development and in-depth exploration of the marine environment has positioned soft biomimetic underwater vehicles (SBUVs) as a research hotspot in the fields of underwater equipment and soft robotics. SBUVs are characterized by bodies made of flexible and…
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The Evolution of Lithography: From Resolution Scaling to Manufacturing Constraints
Lithographic patterning continues to evolve under the dual pressure of ever-finer features and manufacturable, cost-effective integration. Beyond headline resolution, industrial adoption is increasingly determined by a small set of coupled metrics: throughput, overlay (registration), defectivity…
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Heterogeneous Acoustofluidic Distributions Induced by Different Radiation Surface Arrangements in Various Pseudo-Sierpiński-Carpet-Shaped Chambers
In this research, an innovative scheme to generate heterogeneous acoustofluidic distributions in various pseudo-Sierpiński-carpet-shaped chambers with different filling fractions and cross-sectional configurations has been proposed and calculated for topographical manipulation of large-scale…
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Investigation of a Novel Piezoelectric Harvester for Capturing Rotational Motion
Piezoelectric energy harvesting technology has received great research interest in recent years. To harvest energy from rotational motion, this work proposes a cantilevered piezoelectric energy harvester based on an adjustable rigid parallel connection. The baffle was designed as a carrier for the…
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Beam Drift Mitigation and Wide-Range Measurement in a Miniaturized Ultrasonic Gas Flowmeter
To mitigate acoustic beam drift, which degrades the signal-to-noise ratio (SNR) and limits the measurement range in ultrasonic gas flowmeters (USFMs), we present a miniaturized transit-time USFM that integrates a single piezoelectric micromachined ultrasonic transducer (PMUT) with a…
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Trajectory-Based Identification of Rotary-Axis Position-Independent Geometric Errors Considering Excitation Projection Effects
Improving the identification accuracy of geometric errors in five-axis machine tools is a critical requirement in advanced manufacturing. Although rotary axes enhance machining flexibility and productivity, they introduce additional geometric errors, among which position-independent geometric…
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